Sacrifice-layer-free transfer of wafer-scale atomic-layer-deposited dielectrics and full-device stacks for two-dimensional electronics

Y Yuyu He Z Zunxian Lv Z Zhaochao Liu M Mingjian Yang W Wei Ai J Jiabiao Chen W Wanying Chen (Department of Physics, Tsinghua University) B Bing Wang X Xuewen Fu F Feng Luo (National Key Laboratory of Uranium Resources Exploration-Mining and Nuclear Remote Sensing) J Jinxiong Wu