Rotating compensator spectroscopic ellipsometry based on frequency division multiplexing with retardation calibration
J
Jongkyoon Park
A
Alexander Gliserin
S
Sukhyun Choi
Y
Yong Jai Cho
W
Won Chegal
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
November 27, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (5)
J
Jongkyoon Park
A
Alexander Gliserin
S
Sukhyun Choi
Y
Yong Jai Cho
W
Won Chegal
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