Research on application of diamond FAT for black lithium tantalate wafer processing based on nanoindentation and scratch techniques

L Linlin Cao Z Zhijie Huang Z Zhanshuo Zhang W Wei Wei T Tingting Cai X Xiaolong Zhou (Department of Cellular and Genetic Medicine, School of Basic Medical Sciences, Fudan University) C Chengyu Sun (School of Biomedical Engineering, Tsinghua Medicine, Tsinghua University) J Julong Yuan W Wei Hang (Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, and Discipline of Intelligent Instrument and Equipment) H Huiying Ni Y Yingjie Wang