Phase-probability shaping for speckle-free holographic lithography
D
Dong Zhao
W
Weiwei Fu
(State Key Laboratory of Opto-Electronic Information Acquisition and Protection Technology, School of Optoelectronic Science and Engineering, Key Laboratory of Opto-Electronic Information Acquisition and Manipulation of Ministry of Education, Information Materials and Intelligent Sensing Laboratory of Anhui Province, Anhui University)
J
Jun He
Z
Ziqin Li
(College of Materials & State Key Laboratory of Physical Chemistry of Solid Surfaces, College of Chemistry and Chemical Engineering & IKKEM)
F
Fang-Wen Sun
K
Kun Huang
(Molecular Imaging Core, Dana-Farber Cancer Institute, Boston, MA, USA.)
Article Details
Journal
Nature Communications
Volume / Issue
Vol. 16, Issue 1
Published
October 24, 2025
ISSN
2041-1723
Publisher
Nature Portfolio
Authors (6)
D
Dong Zhao
W
Weiwei Fu
State Key Laboratory of Opto-Electronic Information Acquisition and Protection Technology, School of Optoelectronic Science and Engineering, Key Laboratory of Opto-Electronic Information Acquisition and Manipulation of Ministry of Education, Information Materials and Intelligent Sensing Laboratory of Anhui Province, Anhui University
J
Jun He
Z
Ziqin Li
College of Materials & State Key Laboratory of Physical Chemistry of Solid Surfaces, College of Chemistry and Chemical Engineering & IKKEM
F
Fang-Wen Sun
K
Kun Huang
Molecular Imaging Core, Dana-Farber Cancer Institute, Boston, MA, USA.
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