P-type conductivity in GaN:Be epitaxial layers

M M. Zając M M. A. Reshchikov (Department of Physics, Virginia Commonwealth University 1 , Richmond, Virginia 23220,) B B. McEwen (Department of Nanoscale Science and Engineering, State University of New York-Albany 1 , Albany, New York 12203,) F F. Shahendipour-Sandvik (Department of Nanoscale Science and Engineering, SUNY-Albany 3 , Albany, New York 12222,)

Abstract

Electron transport properties of Be-doped heteroepitaxial GaN layers grown by metalorganic vapor phase epitaxy were investigated by means of temperature-dependent Hall effect measurements. The Be concentration was in the range of 4 × 1018−3 × 1019 cm−3. P-type conductivity (not overcompensated by Be-related donors) from the isolated substitutional BeGa acceptors was revealed in all studied samples, with the highest room-temperature hole concentration of 4 × 1013 cm−3 for the most conductive sample. Resistivity of 10 kΩ cm and mobility of about 15 cm2/Vs were achieved. The conductivity decreased with increasing Be concentration, strongly indicating a self-compensation mechanism. Quantitative analysis of temperature-dependent Hall effect data showed a relatively deep position of the BeGa acceptor level, at EV + 0.40 eV. This finding is consistent with the deep polaronic state of the Be acceptor revealed in previous optical and theoretical studies.

Article Details

Volume / Issue Vol. 138, Issue 9
Published September 07, 2025
ISSN 0021-8979
Publisher American Institute of Physics

Journal Info

Journal of Applied Physics

American Institute of Physics

ISSN: 0021-8979 Physical Sciences

Authors (4)

M

M. Zając

M

M. A. Reshchikov

Department of Physics, Virginia Commonwealth University 1 , Richmond, Virginia 23220,

B

B. McEwen

Department of Nanoscale Science and Engineering, State University of New York-Albany 1 , Albany, New York 12203,

F

F. Shahendipour-Sandvik

Department of Nanoscale Science and Engineering, SUNY-Albany 3 , Albany, New York 12222,