Optimizing the crystallinity of ZrO2 gate insulator in indium gallium zinc oxide thin-film transistors through atomic layer deposition process temperature control
H
Hanseok Jeong
S
Soo Min Yoo
M
Minki Choe
I
In-Hwan Baek
W
Woojin Jeon
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
November 25, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (5)
H
Hanseok Jeong
S
Soo Min Yoo
M
Minki Choe
I
In-Hwan Baek
W
Woojin Jeon
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