Optimization and performance study of large aspect ratio SiC microgrooves by waterjet assisted laser machining
Q
Qijian Zhang
W
Wenzhao Yang
X
Xinwei Zhang
(Department of Chemistry, The Hong Kong University of Science and Technology, Clear Water Bay, 999077 Kowloon, Hong Kong SAR, China)
J
Jinjin Han
Y
Yunxia Guo
W
Weining Lei
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
August 09, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (6)
Q
Qijian Zhang
W
Wenzhao Yang
X
Xinwei Zhang
Department of Chemistry, The Hong Kong University of Science and Technology, Clear Water Bay, 999077 Kowloon, Hong Kong SAR, China
J
Jinjin Han
Y
Yunxia Guo
W
Weining Lei
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