Optical diagnostics of low-pressure RF-DBD Ar/CH₄ plasma: mapping electron temperature and density versus power, pressure, and gas flow
D
Dias Ye. Yelubayev
Z
Zhanserik Ye. Ongaibergenov
A
Almasbek U. Utegenov
S
Sagi A. Orazbayev
Y
Yerassyl Yerlanuly
T
Tlekkabul S. Ramazanov
P
Pan Bin
M
Maratbek T. Gabdullin
R
Rakhymzhan Ye. Zhumadilov
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 16, Issue 1
Published
March 26, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (9)
D
Dias Ye. Yelubayev
Z
Zhanserik Ye. Ongaibergenov
A
Almasbek U. Utegenov
S
Sagi A. Orazbayev
Y
Yerassyl Yerlanuly
T
Tlekkabul S. Ramazanov
P
Pan Bin
M
Maratbek T. Gabdullin
R
Rakhymzhan Ye. Zhumadilov
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