Near Room-Temperature Atomic Layer Deposition of Magnesium Oxide Using Bis-3-(<i>N</i>,<i>N</i>-dimethylamino)propyl Magnesium(II) and Water

Florian Preischel

Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany

Karl Rönnby

Tyndall National Institute, Lee Maltings

Lukas Mai

Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany

David Zanders

Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany

Detlef Rogalla

RUBION, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany

Bert Mallick

Inorganic Chemistry 2, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany

Michael Nolan

Tyndall National Institute, Lee Maltings

Anjana Devi

Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany