Monolithic three-dimensional integration of silicon transistors
B
Bao Lam
Y
Yung Man Yu
H
Hyunjun Nam
H
Hsu-Chih Ni
S
Shomik Chatterjee
S
Shaloo Rakheja
J
Jian-Min Zuo
Q
Qing Cao
Article Details
Journal
Nature
Volume / Issue
Vol. 654, Issue 8119
Published
June 18, 2026
Pages
652-659
ISSN
0028-0836
Publisher
Nature Portfolio
Authors (8)
B
Bao Lam
Y
Yung Man Yu
H
Hyunjun Nam
H
Hsu-Chih Ni
S
Shomik Chatterjee
S
Shaloo Rakheja
J
Jian-Min Zuo
Q
Qing Cao
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