Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and homogeneity control

Abstract

Abstract The present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac) 3 and Mn(acac) 3 precursors is demonstrated. Various oxide compositions from Mn x Co 1-x O to Mn x Co 3-x O 4 are synthesized. An acceptable homogeneity in terms of thickness and composition is possible over 25 cm along a tubular reactor which makes this process suitable for industrial application.