Miniaturized broadband computational spectrometer based on graphene microelectromechanical system

Abstract

Miniaturized spectrometers open new avenues for on-chip and portable optical sensing, with broad applications in fundamental research, biomedical analysis, and consumer electronics. Herein, we propose a miniaturized computational spectrometer framework based on a graphene microelectromechanical system (MEMS) Fabry–Pérot (FP) metal-cavity filter. By dynamically tuning the resonant peak wavelength of the FP cavity via the applied driving voltage, the spectral response of the graphene photodetector is calibrated for spectral encoding. Combined with an adaptive regularization algorithm, the proposed framework enables accurate spectral reconstruction. The computational reconstruction-based architecture broadens the operating bandwidth and enhances spectral resolution via its diverse multi-order spectral coding. Numerical simulations demonstrate that the miniaturized spectrometer features a micrometer-scale footprint, achieves a spectral resolution of 3.0 nm, and provides an operating bandwidth of 1.5 μm. Benefiting from the ultrahigh resonant frequency of the graphene-MEMS structure, the photocurrent sampling period of the photodetector is only 100 μs, endowing the spectrometer with submillisecond temporal resolution. This compact, high-performance scheme offers a feasible route toward integrable miniaturized spectrometers for next-generation industrial applications.