Layer-dependent Raman polarization anisotropy in MoS₂ films grown by 200 mm-scale atomic layer deposition

Badreddine Smiri; Thibaut Meyer; Van-Hoan LE; Stéphane Cadot; Nicolas Gauthier; Rayan Jamil; Yann Mazel; Jean Luc Deschanvres; Bernard Pelissier; Emmanuel Nolot

doi:10.1038/s41598-025-09826-x

Layer-dependent Raman polarization anisotropy in MoS₂ films grown by 200 mm-scale atomic layer deposition

B Badreddine Smiri T Thibaut Meyer V Van-Hoan LE S Stéphane Cadot N Nicolas Gauthier R Rayan Jamil Y Yann Mazel J Jean Luc Deschanvres B Bernard Pelissier E Emmanuel Nolot

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Article Details

Journal Scientific Reports

Volume / Issue Vol. 16, Issue 1

Published January 17, 2026

DOI 10.1038/s41598-025-09826-x

ISSN 2045-2322

Publisher Nature Portfolio

Journal Info

Scientific Reports

Nature Portfolio

ISSN: 2045-2322 Open Access Life Sciences

Authors (10)

B

Badreddine Smiri

T

Thibaut Meyer

V

Van-Hoan LE

S

Stéphane Cadot

N

Nicolas Gauthier

R

Rayan Jamil

Y

Yann Mazel

J

Jean Luc Deschanvres

B

Bernard Pelissier

E

Emmanuel Nolot

Layer-dependent Raman polarization anisotropy in MoS₂ films grown by 200 mm-scale atomic layer deposition

Article Details

Journal Info

Authors (10)

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