Investigation into electro mechanical behaviour of MEMS wing shaped dielectric capacitive pressure sensor conforming to set boundary conditions and sizing tolerances

Abstract

Abstract Micro Electro Mechanical Systems (MEMS) based Capacitive Pressure Sensors (CPS) have shown their versatility and reliability in numerous applications. In this work, an innovative approach to optimize sensor performance through the integration of a novel wing-like mechanism is proposed. Unlike traditional CPS this mechanism employs two insulating layers attached to the upper layer of the substrate wing-like structure, which opens when pressure is applied, ultimately leading to the formation of a touch point. By decreasing the distance, the diaphragm must deflect before making contact, making it more responsive to applied pressure the sensor’s sensitivity is greatly increased. Key performance metrics including capacitance variations, capacitive sensitivity and the deflection of diaphragm using small deflection theory have been analytically evaluated. To verify the analytical calculations of capacitance, capacitive sensitivity, and mechanical sensitivity MATLAB is used, while COMSOL Multiphysics is utilized to validate the diaphragm’s deflection.