Intelligent Tactile Perception Revolution: Innovations in Flexible FET‐Based Tactile Sensors for Next‐Gen Human–Machine Interfaces
Abstract
ABSTRACT Field‐effect transistors (FETs) with controllable field‐dependent carrier transport characteristics and unique signal amplification have provided an excellent platform for developing high‐performance artificial sensors and intelligent‐sensing interaction technologies. As the critical component of humanoid robotics, FET‐based tactile sensors with diverse working mechanisms have been studied intensively and have demonstrated remarkable potential in intelligent human–machine interactions. Given that effective carrier‐modulation capabilities of FETs significantly determine critical metrics of tactile sensing systems, this review systematically explores how diverse device, material, and processing innovations create different sensing characteristics, including tactile sensitivity, stretchability, and resolution, that thus underlie diverse strategies to engineer sensing behaviors toward specific applications of FET tactile sensors. We also examine the various strategies, including material–structure co‐design, stretchability engineering, and high‐resolution fabrication technologies, to engineer sensing behaviors in FET tactile sensors toward specific applications spanning wearable electronic skins, tactile‐perceptive neuromorphic systems, and intelligent displays. Finally, we discuss the challenges regarding signal stability under dynamic deformation, response linearity, and saturation in high‐pressure regimes, and scalable high‐resolution integration, and outline promising solutions through the co‐optimization of intrinsically stretchable materials, innovative device architectures, and advanced multi‐scale fabrication processes.
Article Details
Authors (15)
Qiyi Nie
School of Mechatronic Engineering and Automation Shanghai University Shanghai China
Fei Wang
Feng‐Shou Yang
Institute of Electronics Engineering National Tsing Hua University Hsinchu Taiwan
Hanzhi Xun
School of Microelectronics Shanghai University Shanghai China
Jiachen Hou
Institute of Artificial Intelligence School of Future Technology Shanghai University Shanghai China
Qingyang Xu
State Key Laboratory of Biobased Transportation Fuel Technology, Department of Polymer Science and Engineering
Ying Hong
School of Chemistry and Chemical Engineering
Jingyu Zhang
East China University of Science and Technology , , ,
Xueyong Wei
School of Instrument Science and Technology State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an China
Yen‐Fu Lin
Department of Physics National Chung Hsing University Taichung Taiwan
Po‐Wen Chiu
Institute of Electronics Engineering National Tsing Hua University Hsinchu Taiwan
Longhui Zeng
Key Laboratory of Material Physics of Ministry of Education, and School of Physics Zhengzhou University Zhengzhou P. R. China
Mengjiao Li
Biao Wang
New Cornerstone Science Laboratory, Shenzhen Grubbs Institute, Department of Chemistry, and Guangming Advanced Research Institute
Jianhua Zhang