Impact of Strain in Free‐Standing PtSe <sub>2</sub> in Scalable 2D MEMS
Abstract
Abstract 2D layered materials such as PtSe 2 are prime candidates for next‐generation micro‐ and nano‐electro–mechanical systems (MEMS/NEMS), including piezoresistive sensors. However, due to difficulties in large‐scale synthesis and the inherent drawbacks associated with mechanical transfer of 2D material films, scalable NEMS production remains challenging. In this work, we report a fabrication route for free‐standing, as‐grown 2D material channels of PtSe 2 with controlled dimensions, avoiding a mechanical film transfer. The free‐standing devices provide a universal platform for strain engineering of 2D materials because tension can be easily controlled by application of a back‐contact voltage. Moreover, the piezoresistivity of PtSe 2 , together with the possibility of wafer‐scale synthesis at back‐end‐of‐line compatible growth temperatures, make it ideally suited for scalable incorporation into integrated circuits. Our measurements show that the material properties can be tuned via strain, which offers pathways for classically non‐gateable materials in electronic and photonic devices. Finite element simulations of representative free‐standing films elucidate the nano–mechanical properties of large‐scale‐grown, polycrystalline 2D materials under tensile strain and demonstrate the influence of polycrystallinity on the optical and electrical behavior.
Article Details
Authors (17)
Stefan Heiserer
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Natalie Galfe
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Michael Loibl
Institute for Engineering Mechanics and Structural Analysis Faculty of Civil Engineering and Environmental Sciences University of the Bundeswehr Munich 85577 Neubiberg Germany
Maximilian Wagner
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Oliver Hartwig
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Simon Schlosser
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Silke Boche
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
William Thornley
Department of Materials
Nick Clark
Department of Materials and National Graphene Institute University of Manchester Oxford Road Manchester M13 9PL UK
Kangho Lee
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Tanja Stimpel‐Lindner
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Cormac Ó Coileáin
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Josef Kiendl
Institute for Engineering Mechanics and Structural Analysis Faculty of Civil Engineering and Environmental Sciences University of the Bundeswehr Munich 85577 Neubiberg Germany
Sarah J. Haigh
Department of Materials
George J. de Coster
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Georg S. Duesberg
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany
Paul Seifert
Institute of Physics Faculty of Electrical Power Systems and Information Technology and SENS Research Center University of the Bundeswehr Munich 85577 Neubiberg Germany