High inductance density in CMOS-compatible magnetically integrated 3D microinductors for radio-frequency applications

L Li Chen Z Zhiyuan Qiao S Shengbao Liu J Jinbo Yang (Institute of Condensed Matter and Material Physics, School of Physics) Y Yue Wu (Genomic Analysis Laboratory, Salk Institute for Biological Studies, La Jolla, CA, USA.) P Pengchuan Liu (Institute of Optoelectronics and College of Future Information Technology, College of Intelligent Robotics and Advanced Manufacturing, Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Fudan University) Z Zhi Zheng L Luozhao Zhang Y Yuhang Hu T Tingqi Wu W Wen Huang Y Yongfeng Mei (International Institute of Intelligent Nanorobots and Nanosystems & State Key Laboratory of Surface Physics, College of Intelligent Robotics and Advanced Manufacturing, Fudan University) G Gaoshan Huang (International Institute of Intelligent Nanorobots and Nanosystems & State Key Laboratory of Surface Physics, College of Intelligent Robotics and Advanced Manufacturing, Fudan University) J Jizhai Cui (International Institute of Intelligent Nanorobots and Nanosystems & State Key Laboratory of Surface Physics, College of Intelligent Robotics and Advanced Manufacturing, Fudan University)

Article Details

Volume / Issue Vol. 16, Issue 1
Published November 18, 2025
ISSN 2041-1723
Publisher Nature Portfolio

Journal Info

Nature Communications

Nature Portfolio

ISSN: 2041-1723 Open Access Life Sciences

Authors (14)

L

Li Chen

Z

Zhiyuan Qiao

S

Shengbao Liu

J

Jinbo Yang

Institute of Condensed Matter and Material Physics, School of Physics

Y

Yue Wu

Genomic Analysis Laboratory, Salk Institute for Biological Studies, La Jolla, CA, USA.

P

Pengchuan Liu

Institute of Optoelectronics and College of Future Information Technology, College of Intelligent Robotics and Advanced Manufacturing, Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Fudan University

Z

Zhi Zheng

L

Luozhao Zhang

Y

Yuhang Hu

T

Tingqi Wu

W

Wen Huang

Y

Yongfeng Mei

International Institute of Intelligent Nanorobots and Nanosystems & State Key Laboratory of Surface Physics, College of Intelligent Robotics and Advanced Manufacturing, Fudan University

G

Gaoshan Huang

International Institute of Intelligent Nanorobots and Nanosystems & State Key Laboratory of Surface Physics, College of Intelligent Robotics and Advanced Manufacturing, Fudan University

J

Jizhai Cui

International Institute of Intelligent Nanorobots and Nanosystems & State Key Laboratory of Surface Physics, College of Intelligent Robotics and Advanced Manufacturing, Fudan University