Growth window and wurtzite phase stability of molecular-beam-epitaxial ScInN thin films with composition-dependent photoluminescence

S S. A. Jentsch (Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,) M M. F. Zscherp (Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,) D D. Filippozzi (Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,) M M. Lauer (Institute for Theoretical Physics and Center for Materials Research, Justus Liebig University Giessen 2 , Giessen D-35392,) F F. Schäfer (Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,) M M. Stein (Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,) L L. Chen J J. M. Waack (Institute for Theoretical Physics and Center for Materials Research, Justus Liebig University Giessen 2 , Giessen D-35392,) F F. Meierhofer (Institute of Semiconductor Technology, Technische Universität Braunschweig 3 , Braunschweig D-38106,) C C. Margenfeld (Institute of Semiconductor Technology, Technische Universität Braunschweig 3 , Braunschweig D-38106,) A A. Waag (Institute of Semiconductor Technology, Technische Universität Braunschweig 3 , Braunschweig D-38106,) P P. J. Klar (Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,) C C. Heiliger (Institute for Theoretical Physics and Center for Materials Research, Justus Liebig University Giessen 2 , Giessen D-35392,) S S. Chatterjee J J. Schörmann (Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,)

Abstract

We establish the growth window and wurtzite phase stability of plasma-assisted molecular-beam-epitaxial ScInN thin films over a broad composition range. Lower growth temperatures suppress rock salt phase formation and enable wurtzite ScInN without detectable rock salt contributions up to x(Sc) = 0.36. X-ray diffraction reveals systematic composition-dependent changes in phase formation and lattice parameters. We observe a pronounced anisotropic lattice evolution, with the in-plane lattice parameter a showing only a minor dependence on scandium content, whereas a decrease in the out-of-plane lattice parameter c is more pronounced. This trend is consistent with results from density functional theory calculations we performed using the SCAN functional, as well as Raman spectroscopy measurements showing a strong shift of the A1(LO) modes and a much smaller shift of the E2 mode. Photoluminescence is observed across the investigated alloy series, with the maximum emission shifting from 0.85 eV for InN to 2.07 eV for x(Sc) = 0.40. These results establish molecular-beam-epitaxial ScInN as an experimentally accessible alloy system with an extended wurtzite stability range, a composition-dependent optical response, and a nearly constant in-plane lattice parameter enabling heterostructure design with reduced lattice mismatch.

Article Details

Volume / Issue Vol. 140, Issue 5
Published August 07, 2026
ISSN 0021-8979
Publisher American Institute of Physics

Journal Info

Journal of Applied Physics

American Institute of Physics

ISSN: 0021-8979 Physical Sciences

Authors (15)

S

S. A. Jentsch

Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,

M

M. F. Zscherp

Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,

D

D. Filippozzi

Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,

M

M. Lauer

Institute for Theoretical Physics and Center for Materials Research, Justus Liebig University Giessen 2 , Giessen D-35392,

F

F. Schäfer

Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,

M

M. Stein

Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,

L

L. Chen

J

J. M. Waack

Institute for Theoretical Physics and Center for Materials Research, Justus Liebig University Giessen 2 , Giessen D-35392,

F

F. Meierhofer

Institute of Semiconductor Technology, Technische Universität Braunschweig 3 , Braunschweig D-38106,

C

C. Margenfeld

Institute of Semiconductor Technology, Technische Universität Braunschweig 3 , Braunschweig D-38106,

A

A. Waag

Institute of Semiconductor Technology, Technische Universität Braunschweig 3 , Braunschweig D-38106,

P

P. J. Klar

Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,

C

C. Heiliger

Institute for Theoretical Physics and Center for Materials Research, Justus Liebig University Giessen 2 , Giessen D-35392,

S

S. Chatterjee

J

J. Schörmann

Institute of Experimental Physics I and Center for Materials Research, Justus Liebig University Giessen 1 , Giessen D-35392,