Geometry‐Programmable Light‐Driven Silicon Microrobots
Abstract
ABSTRACT Light‐driven micro/nanorobots (LMNRs) offer on‐demand propulsion governed by light direction, wavelength, and polarization, yet their architectures and navigation behaviors have been constrained by limited fabrication strategies. Here, we present a general and scalable strategy for geometry‐programmable silicon LMNRs based on plasma‐enhanced chemical vapor deposition. This approach yields libraries of silicon microrobots with deterministically tailored 0D, 1D, 2D, and 3D geometries, greatly expanding the accessible design space. Under visible and near‐infrared illumination, the LMNRs exhibit efficient propulsion and precise, light‐programmable trajectories, with guidance further augmented by magnetic steering. Surface functionalization with bacteriophages imparts species‐selective bacterial capture, enabling targeted biointeractions. By integrating structural programmability, multimodal actuation, and bioselective interfaces in a silicon platform, this work establishes a versatile foundation for multifunctional LMNRs, paving the way for micro/nanorobotic applications in precision therapy, environmental monitoring, and micro/nano‐manufacturing.
Article Details
Authors (13)
Kunfeng Liu
College of Chemistry and Materials Science, Guangdong Provincial Key Laboratory of Supramolecular Coordination Chemistry Jinan University Guangzhou Guangdong 510632 P.R. China
Rong Huang
Wanyuan Li
College of Chemistry and Materials Science, Guangdong Provincial Key Laboratory of Supramolecular Coordination Chemistry Jinan University Guangzhou Guangdong 510632 P.R. China
Jingsong Yao
College of Chemistry and Materials Science Jinan University Guangzhou P. R. China
Dapeng Lei
College of Chemistry and Materials Science, Guangdong Provincial Key Laboratory of Supramolecular Coordination Chemistry Jinan University Guangzhou Guangdong 510632 P.R. China
Guangdong Yang
College of Chemistry and Materials Science Jinan University Guangzhou P. R. China
Zhuochen Huang
College of Chemistry and Materials Science Jinan University Guangzhou P. R. China
Li Chen
Hao Sun
Ze Xiong
School of Biomedical Engineering & State Key Laboratory of Advanced Medical Materials and Devices ShanghaiTech University Shanghai P. R. China
Jizhuang Wang
College of Chemistry and Materials Science, Guangdong Provincial Key Laboratory of Supramolecular Coordination Chemistry
Jinyao Tang
Department of Chemistry
Dan Li