Flexible electro-hydraulic power chips

C Chao Zhang J Jionghao Chen C Changyi Xu (School of Advanced Energy) T Tairan He X Xiaolong Zhang (State Key Laboratory of Precision and Intelligent Chemistry, Hefei National Research Center for Physical Sciences at the Microscale, School of Chemistry and Materials Science) J Junhui Zhang X Ximing Sun B Bing Xu Y Yi Zhu H Huayong Yang (State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou, China.)