First-principles calculations reveal precursor-dependent reaction mechanisms in ZrO2 atomic layer deposition
Y
Yunseok Kim
M
Mai Phuong Uyen Vu
H
Ho Jun Kim
H
Hwanyeol Park
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 16, Issue 1
Published
April 16, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (4)
Y
Yunseok Kim
M
Mai Phuong Uyen Vu
H
Ho Jun Kim
H
Hwanyeol Park
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