Feedforward compensation of piezo nonlinearity for high-precision high-speed atomic force microscopy
K
Kenichi Umeda
N
Noriyuki Kodera
(Nano Life Science Institute, Kanazawa University)
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 1, Issue 1
Published
May 29, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (2)
K
Kenichi Umeda
N
Noriyuki Kodera
Nano Life Science Institute, Kanazawa University
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