Fast micromirror selection and angle setting algorithm for freeform pupil in the illumination system for immersion lithography machines
Z
Zhenxin Huang
(School of Chemical Engineering and Technology, National Innovation Platform (center) for Industry-Education Integration of Energy Storage Technology, State Key Laboratory of Fluorine & Nitrogen Chemicals)
Z
Zenghui Yang
A
Aijun Zeng
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
December 22, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (3)
Z
Zhenxin Huang
School of Chemical Engineering and Technology, National Innovation Platform (center) for Industry-Education Integration of Energy Storage Technology, State Key Laboratory of Fluorine & Nitrogen Chemicals
Z
Zenghui Yang
A
Aijun Zeng
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