Fabrication of high-quality large-scale ultrathin and narrow YBa2Cu3O7−δ superconducting meander wire array

Abstract

Large-scale quantum devices based on high-temperature superconductors and other sensitive materials are promising for next-generation quantum sensing and imaging, yet their practical realization is hindered by device non-uniformity, scalability, and degradation of materials properties during fabrication. Here we present a universal strategy for large-area high-temperature superconducting array with excellent uniformly. Using ultrathin YBa2Cu3O7−δ (YBCO) films and a high-precision SiNx stencil mask for fine electrodes definition, we preserve the intrinsic performance and large-area uniformity of YBCO prior to microwire patterning. Together with the low-damage film patterning process, we fabricate a 64 × 64 meandered wire array with a linewidth of 1 μm, edge roughness below 16 nm, and an effective sidewall-damage width of ∼50 nm. Comprehensive characterization of 121 devices reveals high uniformity, with a critical temperature of 75 K and 86.8% of units exhibiting a critical current within a narrow 2 ± 0.1 mA range. This scalable, low-damage approach not only overcomes the processing bottlenecks of YBCO but also provides a versatile platform applicable to a broad spectrum of fragile quantum materials, paving the way for next-generation superconducting electronics and imaging systems.