Fabrication and dimensional scaling of SiNW-FET array via AFM-LAO lithography and self-limiting oxidation
N
Nurain Najihah Alias
M
Muhammad Aniq Shazni Mohammad Haniff
K
Khatijah Aisha Yaacob
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
September 25, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (3)
N
Nurain Najihah Alias
M
Muhammad Aniq Shazni Mohammad Haniff
K
Khatijah Aisha Yaacob
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