Experimental study of inductively coupled plasma etching of patterned single crystal diamonds
L
Lei Zhao
(School of Life Sciences, Key Laboratory of Pesticide and Chemical Biology of Ministry of Education, and Hubei Key Laboratory of Genetic Regulation and Integrative Biology, Central China Normal University)
X
Xiangbing Wang
N
Nan Jiang
K
Kazhihito Nishimura
J
Jian Yi
S
Shuangquan Fang
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
July 01, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (6)
L
Lei Zhao
School of Life Sciences, Key Laboratory of Pesticide and Chemical Biology of Ministry of Education, and Hubei Key Laboratory of Genetic Regulation and Integrative Biology, Central China Normal University
X
Xiangbing Wang
N
Nan Jiang
K
Kazhihito Nishimura
J
Jian Yi
S
Shuangquan Fang
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