Epitaxial Cr2MnO4 p–n heterojunction to (2¯01) β-Ga2O3 deposited via off-axis magnetron sputtering
Abstract
We report the heteroepitaxial growth of spinel Cr2MnO4 thin films on (2¯01) β-Ga2O3 substrates via off-axis RF magnetron sputtering. Structural analysis confirms (111)-oriented epitaxial films with optimized growth at 950 °C. Fabricated Cr2MnO4/β-Ga2O3 vertical diodes exhibit rectifying behavior with high on/off ratios (∼108), turn-on voltages near 0.85 V, and low reverse leakage current. Transmission electron microscopy and atomic force microscopy analyses show the films exhibit a Stranski–Krastanov growth mode, with three-dimensional texturing of potential interest for device performance. Capacitance–voltage measurements reveal intrinsic p-type conductivity with carrier concentration ∼7 × 1017 cm−3. The results suggest that Cr2MnO4 may be a promising candidate for Ga2O3-based bipolar devices.
Article Details
Journal Info
Journal of Applied Physics
American Institute of Physics
Authors (17)
Babajide Akintunde
Department of Physics and Astronomy, University of Alabama 1 , Tuscaloosa, Alabama 35487,
Naomi Derksen
Department of Physics and Astronomy, University of Alabama 1 , Tuscaloosa, Alabama 35487,
Ashik Imran
Department of Physics and Astronomy, University of Alabama 1 , Tuscaloosa, Alabama 35487,
James C. Gallagher
U.S. Naval Research Laboratory 2 , Washington, DC 20375,
Marko J. Tadjer
U.S. Naval Research Laboratory 2 , Washington, D.C. 20375,
Audrey Rose Gutierrez
National Research Council 3 , Washington, D.C. 20001,
Merlin J. Hall
Department of Physics, Western Michigan University 4 , Kalamazoo, Michigan 49008,
Jared T. Orent
Department of Physics, Western Michigan University 4 , Kalamazoo, Michigan 49008,
Gaurab Rimal
Department of Physics, Western Michigan University 4 , Kalamazoo, Michigan 49008,
Asghar N. Kayani
Department of Physics, Western Michigan University 4 , Kalamazoo, Michigan 49008,
Daniel J. Pennachio
U.S. Naval Research Laboratory 2 , Washington, D.C. 20375,
Koushik Dey
Department of Metallurgical and Materials Engineering, University of Alabama 5 , Tuscaloosa, Alabama 35487,
Xin Wang
Katie R. Gann
Department of Materials Science and Engineering, Cornell University 1 , Ithaca, New York 14853,
Karl D. Hobart
U.S. Naval Research Laboratory 2 , Washington, D.C. 20375,
Michael A. Mastro
Power and Advanced Materials Branch, US Naval Research Laboratory 3 , Washington, District of Columbia 20375,
Adam J. Hauser
Department of Physics and Astronomy, University of Alabama 1 , Tuscaloosa, Alabama 35487,