Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment
T
Tingting Yang
(The MOE Basic Research and Innovation Center for the Targeted Therapeutics of Solid Tumors, School of Basic Medical Sciences, The Second Affiliated Hospital, Jiangxi Medical College, Nanchang University, Nanchang, Jiangxi, China.)
Q
Qinwen Xu
Y
Yaxin Wang
Y
Yao Cai
(Institute of Chemistry)
H
Haiyang Li
Y
Yupeng Zheng
M
Min Zeng
(Key Laboratory of Special Functional and Smart Polymer Materials of Ministry of Industry and Information Technology, Xi’an Key Laboratory of Functional Organic Porous Materials, School of Chemistry and Chemical Engineering)
J
Jingyi Qu
L
Lei Li
C
Chao Gao
X
Xiyu Gu
B
Binghui Lin
S
Shishang Guo
C
Cheng Lei
S
Sheng Liu
C
Chengliang Sun
Article Details
Journal
Nature Communications
Volume / Issue
Vol. 17, Issue 1
Published
February 06, 2026
ISSN
2041-1723
Publisher
Nature Portfolio
Authors (16)
T
Tingting Yang
The MOE Basic Research and Innovation Center for the Targeted Therapeutics of Solid Tumors, School of Basic Medical Sciences, The Second Affiliated Hospital, Jiangxi Medical College, Nanchang University, Nanchang, Jiangxi, China.
Q
Qinwen Xu
Y
Yaxin Wang
Y
Yao Cai
Institute of Chemistry
H
Haiyang Li
Y
Yupeng Zheng
M
Min Zeng
Key Laboratory of Special Functional and Smart Polymer Materials of Ministry of Industry and Information Technology, Xi’an Key Laboratory of Functional Organic Porous Materials, School of Chemistry and Chemical Engineering
J
Jingyi Qu
L
Lei Li
C
Chao Gao
X
Xiyu Gu
B
Binghui Lin
S
Shishang Guo
C
Cheng Lei
S
Sheng Liu
C
Chengliang Sun
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