Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment

T Tingting Yang (The MOE Basic Research and Innovation Center for the Targeted Therapeutics of Solid Tumors, School of Basic Medical Sciences, The Second Affiliated Hospital, Jiangxi Medical College, Nanchang University, Nanchang, Jiangxi, China.) Q Qinwen Xu Y Yaxin Wang Y Yao Cai (Institute of Chemistry) H Haiyang Li Y Yupeng Zheng M Min Zeng (Key Laboratory of Special Functional and Smart Polymer Materials of Ministry of Industry and Information Technology, Xi’an Key Laboratory of Functional Organic Porous Materials, School of Chemistry and Chemical Engineering) J Jingyi Qu L Lei Li C Chao Gao X Xiyu Gu B Binghui Lin S Shishang Guo C Cheng Lei S Sheng Liu C Chengliang Sun

Article Details

Volume / Issue Vol. 17, Issue 1
Published February 06, 2026
ISSN 2041-1723
Publisher Nature Portfolio

Journal Info

Nature Communications

Nature Portfolio

ISSN: 2041-1723 Open Access Life Sciences

Authors (16)

T

Tingting Yang

The MOE Basic Research and Innovation Center for the Targeted Therapeutics of Solid Tumors, School of Basic Medical Sciences, The Second Affiliated Hospital, Jiangxi Medical College, Nanchang University, Nanchang, Jiangxi, China.

Q

Qinwen Xu

Y

Yaxin Wang

Y

Yao Cai

Institute of Chemistry

H

Haiyang Li

Y

Yupeng Zheng

M

Min Zeng

Key Laboratory of Special Functional and Smart Polymer Materials of Ministry of Industry and Information Technology, Xi’an Key Laboratory of Functional Organic Porous Materials, School of Chemistry and Chemical Engineering

J

Jingyi Qu

L

Lei Li

C

Chao Gao

X

Xiyu Gu

B

Binghui Lin

S

Shishang Guo

C

Cheng Lei

S

Sheng Liu

C

Chengliang Sun