Enhanced magnetic field sensitivity of shallow NV− ensembles via high-temperature implantation
Abstract
Dense and shallow ensembles of negatively charged nitrogen-vacancy center (NV−) with good optical and spin properties play a key role in the performance enhancement of diamond-based quantum sensors. Ion implantation enables precise control of NV− depth and density. However, at high ion fluence, this method is limited by low NV− creation yields and sample amorphization. Additionally, shallow NV− spin properties deteriorate due to surface proximity. In this paper, we study N2+ ion implantation at energies between 10 and 15 keV with fluences as high as 1×1015 ions/cm2 at temperatures of 20, 400, and 800°C to investigate the influence of implantation temperature on lattice damage, NV− creation yield, and NV− spin properties. Our results show that diamond maintains structural integrity at 800°C with fluences up to 1×1015 ions/cm2 without amorphization. Furthermore, high-temperature implantation improves NV− creation yields up to five times without compromising T2∗, T2, and T1, making it a promising approach to enhance the magnetic field sensitivity of NV− ensembles.
Article Details
Journal Info
Journal of Applied Physics
American Institute of Physics
Authors (10)
J. Al Yahya
Chimie ParisTech, PSL University, CNRS, Institut de Recherche de Chimie Paris 1 , 75005 Paris,
A. Bach
Chimie ParisTech, PSL University, CNRS, Institut de Recherche de Chimie Paris 1 , 75005 Paris,
J. Panigrahi
Chimie ParisTech, PSL University, CNRS, Institut de Recherche de Chimie Paris 1 , 75005 Paris,
P. Perrin
Chimie ParisTech, PSL University, CNRS, Institut de Recherche de Chimie Paris 1 , 75005 Paris,
I. Balasa
Chimie ParisTech, PSL University, CNRS, Institut de Recherche de Chimie Paris 1 , 75005 Paris,
D. Serrano
Chimie ParisTech, PSL University, CNRS, Institut de Recherche de Chimie Paris 1 , 75005 Paris,
A. Tiranov
Chimie ParisTech, PSL University, CNRS, Institut de Recherche de Chimie Paris 1 , 75005 Paris,
J. Achard
CNRS, Laboratoire des Sciences des Procédés et des Matériaux, Sorbonne Paris Nord University 2 , 93430 Villetaneuse,
A. Tallaire
Chimie ParisTech, PSL University, CNRS, Institut de Recherche de Chimie Paris 1 , 75005 Paris,
P. Goldner
Chimie ParisTech, Université PSL, CNRS, Institut de Recherche de Chimie Paris 2 , 75005 Paris,