Eliminating nanometer-scale asperities on metallic thin films through plasma modification processes studied by molecular dynamics and AFM
T
Tomoyuki Tsuyama
T
Tatsuki Oyama
Y
Yu Azuma
H
Haruhisa Ohashi
M
Masahiro Irie
A
Ayumi Yamakawa
S
Shoko Uetake
T
Takayuki Konno
T
Takahiro Ukai
K
Kohei Ochiai
N
Nobuyuki Iwaoka
A
Atsushi Hashimoto
Y
Yoshishige Okuno
(Resonac Corporation, 8 Ebisu, Yokohama, Kanagawa 221-0024, Japan)
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
April 09, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (13)
T
Tomoyuki Tsuyama
T
Tatsuki Oyama
Y
Yu Azuma
H
Haruhisa Ohashi
M
Masahiro Irie
A
Ayumi Yamakawa
S
Shoko Uetake
T
Takayuki Konno
T
Takahiro Ukai
K
Kohei Ochiai
N
Nobuyuki Iwaoka
A
Atsushi Hashimoto
Y
Yoshishige Okuno
Resonac Corporation, 8 Ebisu, Yokohama, Kanagawa 221-0024, Japan
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