Eliminating nanometer-scale asperities on metallic thin films through plasma modification processes studied by molecular dynamics and AFM

T Tomoyuki Tsuyama T Tatsuki Oyama Y Yu Azuma H Haruhisa Ohashi M Masahiro Irie A Ayumi Yamakawa S Shoko Uetake T Takayuki Konno T Takahiro Ukai K Kohei Ochiai N Nobuyuki Iwaoka A Atsushi Hashimoto Y Yoshishige Okuno (Resonac Corporation, 8 Ebisu, Yokohama, Kanagawa 221-0024, Japan)

Article Details

Volume / Issue Vol. 15, Issue 1
Published April 09, 2025
ISSN 2045-2322
Publisher Nature Portfolio

Journal Info

Scientific Reports

Nature Portfolio

ISSN: 2045-2322 Open Access Life Sciences

Authors (13)

T

Tomoyuki Tsuyama

T

Tatsuki Oyama

Y

Yu Azuma

H

Haruhisa Ohashi

M

Masahiro Irie

A

Ayumi Yamakawa

S

Shoko Uetake

T

Takayuki Konno

T

Takahiro Ukai

K

Kohei Ochiai

N

Nobuyuki Iwaoka

A

Atsushi Hashimoto

Y

Yoshishige Okuno

Resonac Corporation, 8 Ebisu, Yokohama, Kanagawa 221-0024, Japan