Effect of post-metallization anneal on monolithic co-integration of Hf0.5Zr0.5O2-based FeFET and CMOS
J
Jehyun An
B
Beomjoo Ham
G
Giryun Hong
J
Jongseo Park
B
Bohyeon Kang
J
Jaeseong Pyo
S
Sung-Min Ahn
R
Rock-Hyun Baek
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
May 18, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (8)
J
Jehyun An
B
Beomjoo Ham
G
Giryun Hong
J
Jongseo Park
B
Bohyeon Kang
J
Jaeseong Pyo
S
Sung-Min Ahn
R
Rock-Hyun Baek
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