Effect of inclusions on polished Si removal mechanism via MD
H
Haixia Yue
S
Song Tang
X
Xiaoqin Chen
(State Key Laboratory of Catalysis, Dalian Institute of Chemical Physics)
Y
Yan Tan
H
Houfu Dai
S
Song Wei
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 16, Issue 1
Published
March 04, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (6)
H
Haixia Yue
S
Song Tang
X
Xiaoqin Chen
State Key Laboratory of Catalysis, Dalian Institute of Chemical Physics
Y
Yan Tan
H
Houfu Dai
S
Song Wei
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