Dynamic 3D profiling of microscale surface using a MEMS mirror laser differential confocal microscope
Q
Qingjiu Chen
D
Donghai Yang
F
Feifei Wang
W
Wen Jung Li
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
July 17, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (4)
Q
Qingjiu Chen
D
Donghai Yang
F
Feifei Wang
W
Wen Jung Li
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