Dielectric function, band-to-band transitions, and exciton properties of bulk single-crystal In2O3 from room temperature to 600 °C determined by <i>in situ</i> spectroscopic ellipsometry

S Sema Guvenc Kilic (Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,) U Ufuk Kilic (Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,) M Matthew Hilfiker (Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,) E Eva Schubert (Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,) Z Zbigniew Galazka (Leibniz-Institut für Kristallzüchtung (IKZ) 2 , Max-Born-Straße 2, 12489 Berlin,) M Mathias Schubert (Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,)

Abstract

We investigate the temperature-dependent complex dielectric function of bulk single-crystal In2O3 over the spectral range of 1–6 eV and temperatures from room temperature to 600 °C under high-vacuum conditions using in situ spectroscopic ellipsometry. The dielectric function was modeled using wavelength-by-wavelength and critical-point model dielectric function analyses. The dielectric function exhibits pronounced alterations with increasing temperature, attributed to thermally induced changes in the band structure and carrier dynamics. We identify direct and indirect interband transitions and excitonic contributions associated with the direct bandgap near the onset of absorption. At elevated temperatures, features in the dielectric function due to indirect transitions emerge below the direct bandgap energy, which shift toward shorter photon energies with increasing temperature. Combining our results with low-temperature data from previous reports, both observed shifts of the direct and indirect transitions can be seamlessly explained with the Bose–Einstein model. The direct transition is coupled less strong to the phonon bath (average temperature θB=512 K), leading to a smaller high-temperature slope (γ=−0.2 meV/K) than for the indirect transition (θB=360 K, γ=−1.3 meV/K). The exciton contributions diminish toward higher temperatures reflected by the decrease in amplitude and increase in broadening model parameters. Our parameter set can be used to calculate the model dielectric function In2O3 at elevated temperatures.

Article Details

Volume / Issue Vol. 139, Issue 14
Published April 14, 2026
ISSN 0021-8979
Publisher American Institute of Physics

Journal Info

Journal of Applied Physics

American Institute of Physics

ISSN: 0021-8979 Physical Sciences

Authors (6)

S

Sema Guvenc Kilic

Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,

U

Ufuk Kilic

Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,

M

Matthew Hilfiker

Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,

E

Eva Schubert

Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,

Z

Zbigniew Galazka

Leibniz-Institut für Kristallzüchtung (IKZ) 2 , Max-Born-Straße 2, 12489 Berlin,

M

Mathias Schubert

Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 1 , Lincoln, Nebraska 68588,