Journal of Applied Physics

Demonstrating the accuracy of terahertz absorption spectroscopy and cavity ringdown spectroscopy by a comparison of atomic oxygen density measurements

J J. R. Wubs (Department of Applied Physics and Science Education, Eindhoven University of Technology 1 , P.O. Box 513, Eindhoven 5600 MB,) A A. S. C. Nave (Silicon Austria Labs GmbH 2 , Europastr. 12, Villach 9524,) U U. Macherius (Leibniz Institute for Plasma Science and Technology (INP) 3 , Felix-Hausdorff-Str. 2, Greifswald 17489,) L L. Invernizzi (Laboratoire des Sciences des Procédés et des Matériaux (LSPM), CNRS, Université Sorbonne Paris Nord, UPR 3407 4 , Villetaneuse F-93430,) K K. Gazeli (Laboratoire des Sciences des Procédés et des Matériaux (LSPM), CNRS, Université Sorbonne Paris Nord, UPR 3407 4 , Villetaneuse F-93430,) G G. Lombardi X X. Lu L L. Schrottke (Paul-Drude-Institut für Festkörperelektronik, Leibniz-Institut im Forschungsverbund Berlin e.V. 5 , Hausvogteiplatz 5-7, Berlin 10117,) K K.-D. Weltmann (Leibniz Institute for Plasma Science and Technology (INP) 3 , Felix-Hausdorff-Str. 2, Greifswald 17489,) J J. H. van Helden (Experimental Physics V, Spectroscopy of Atoms and Molecules by Laser Methods, Faculty of Physics and Astronomy, Ruhr University Bochum 6 , Bochum 44780,)

Abstract

This work presents a comparison of absolute ground-state atomic oxygen densities measured with terahertz (THz) absorption spectroscopy and cavity ringdown spectroscopy (CRDS). All measurements were performed on the same capacitively coupled radio frequency oxygen discharge, for applied powers in the range of 20–100 W and gas pressures of 70 and 130 Pa. When preconditioning of the reactor walls was taken into account to ensure reproducibility of the results, the atomic oxygen densities obtained with THz absorption spectroscopy and CRDS were found to be in excellent agreement. It can be concluded that both of these techniques can be reliably used to measure line-of-sight integrated atomic oxygen densities with high accuracy.

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Article Details

Volume / Issue Vol. 140, Issue 7
Published August 21, 2026
ISSN 0021-8979
Publisher American Institute of Physics

Journal Info

Journal of Applied Physics

American Institute of Physics
ISSN: 0021-8979 Physical Sciences

Authors (10)

J

J. R. Wubs

Department of Applied Physics and Science Education, Eindhoven University of Technology 1 , P.O. Box 513, Eindhoven 5600 MB,

A

A. S. C. Nave

Silicon Austria Labs GmbH 2 , Europastr. 12, Villach 9524,

U

U. Macherius

Leibniz Institute for Plasma Science and Technology (INP) 3 , Felix-Hausdorff-Str. 2, Greifswald 17489,

L

L. Invernizzi

Laboratoire des Sciences des Procédés et des Matériaux (LSPM), CNRS, Université Sorbonne Paris Nord, UPR 3407 4 , Villetaneuse F-93430,

K

K. Gazeli

Laboratoire des Sciences des Procédés et des Matériaux (LSPM), CNRS, Université Sorbonne Paris Nord, UPR 3407 4 , Villetaneuse F-93430,

G

G. Lombardi

X

X. Lu

L

L. Schrottke

Paul-Drude-Institut für Festkörperelektronik, Leibniz-Institut im Forschungsverbund Berlin e.V. 5 , Hausvogteiplatz 5-7, Berlin 10117,

K

K.-D. Weltmann

Leibniz Institute for Plasma Science and Technology (INP) 3 , Felix-Hausdorff-Str. 2, Greifswald 17489,

J

J. H. van Helden

Experimental Physics V, Spectroscopy of Atoms and Molecules by Laser Methods, Faculty of Physics and Astronomy, Ruhr University Bochum 6 , Bochum 44780,

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