Deep learning denoising enables rapid SEM imaging under charging conditions for FE SEM, CD SEM, and review SEM
H
Hyungjoo Park
B
Beom-Seok Oh
K
Kuk Jin Jang
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 16, Issue 1
Published
December 29, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (3)
H
Hyungjoo Park
B
Beom-Seok Oh
K
Kuk Jin Jang
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