Data-driven optimization of maskless grayscale laser lithography
A
Adrian H. A. Lutey
D
David Kuhness
S
Seyyedhossein Mckee
V
Vincenzo Ferraro
M
Marco Negozio
W
Walter Belardi
L
Luca Romoli
M
Markus Postl
B
Barbara Stadlober
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
November 17, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (9)
A
Adrian H. A. Lutey
D
David Kuhness
S
Seyyedhossein Mckee
V
Vincenzo Ferraro
M
Marco Negozio
W
Walter Belardi
L
Luca Romoli
M
Markus Postl
B
Barbara Stadlober
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