Core‐Shell Engineering of PSD@HKUST‐1 With Hierarchical Channels for Accelerated SF ₆ /N ₂ Separation

Abstract

ABSTRACT The separation of sulfur hexafluoride (SF 6 ) from nitrogen (N 2 ) is an essential challenge for semiconductor industrial gas purification due to the size similarity. While microporous adsorbents exhibit highly selective adsorption, their high‐capacity results in greater mass transfer resistance, longer separation times, and increased energy consumption during regeneration. Featuring a tunable shell thickness, core‐shell structured PSD@HKUST‐1s were synthesized via an in ‐situ growth approach. Benefiting from the outer‐layer gas enrichment effect, the SF 6 /N 2 IAST selectivity of optimized PSD@HKUST‐1‐AcOH boosts to 924, which is significantly higher than that of pristine HKUST‐1, with about 25% lower cost. By leveraging a thin microporous shell to retain high SF 6 /N 2 selectivity while utilizing a mesoporous core to accelerate gas diffusion, PSD@HKUST‐1s enable shorter separation times and demonstrate robust cyclic stability. This work highlights PSD@HKUST‐1s as cost‐effective, high‐performance candidates for semiconductor‐related SF 6 /N 2 separation and demonstrates a promising strategy via core‐shell design and mass transfer optimization.