Copper damascene process-based high-performance thin-film lithium tantalate modulators
M
Mengxin Lin
Z
Zihan Li
A
Alexander Kotz
H
Hugo Larocque
N
Nikolai Kuznetsov
J
Jiale Sun
Y
Yichi Zhang
S
Shuhang Zheng
J
Johann Riemensberger
C
Christian Koos
T
Tobias J. Kippenberg
Article Details
Journal
Nature Communications
Volume / Issue
Vol. 17, Issue 1
Published
February 26, 2026
ISSN
2041-1723
Publisher
Nature Portfolio
Authors (11)
M
Mengxin Lin
Z
Zihan Li
A
Alexander Kotz
H
Hugo Larocque
N
Nikolai Kuznetsov
J
Jiale Sun
Y
Yichi Zhang
S
Shuhang Zheng
J
Johann Riemensberger
C
Christian Koos
T
Tobias J. Kippenberg
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