Color centers and crystal structural transformations induced by femtosecond laser writing in 4H-SiC

X Xinghua Liu J Junxian Luo (National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, and Collaborative Innovation Center of Advanced Microstructures, Nanjing University 3 , Nanjing 210023,) J Jiandong Ye (School of Electronic Science and Engineering, Nanjing University 2 , Nanjing 210023,) J Jie Fu (Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory of Advanced Negative Carbon Technologies, Soochow University, 199 Ren’ai Road, Suzhou, Jiangsu 215123, China) Q Qunsi Yang (State Key Laboratory of Silicon and Advanced Semiconductor Materials & School of Materials Science and Engineering, Zhejiang University 3 , Hangzhou 310027,) Y Yiwang Wang (School of Electronic Science and Engineering, Nanjing University 1 , Nanjing 210023,) X Xiufang Chen (Institute of Novel Semiconductors, Shandong University 1 , Jinan 250100,) T Tao Tao B Bin Liu Q Qiang Xu (Key Laboratory of Material Simulation Methods & Software of Ministry of Education, College of Physics) H Haizhi Song (Southwest Institute of Technical Physics 5 , Chengdu 610041,) W Weizong Xu (School of Electronic Science and Engineering, Jiangsu Key Laboratory of Advanced Semiconductors and High Energy Efficiency Devices, and Key Laboratory of Optoelectronic Devices and Systems with Extreme Performances of MOE, Nanjing University 1 , Nanjing 210023,) D Dong Zhou F Feng Zhou X Xiangang Xu (Institute of Novel Semiconductors, Shandong University 1 , Jinan 250100,) F Fang-fang Ren (School of Electronic Science and Engineering, Nanjing University 2 , Nanjing 210023,) F Fei Xu H Hai Lu R Rong Zhang (Department of Materials Science and Engineering, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong 999077, China)

Abstract

Silicon carbide (SiC), a wide-bandgap semiconductor, is gaining importance in quantum technologies due to its promising color centers. Among SiC polytypes, 4H-SiC stands out with its wide bandgap and low impurities, making it ideal for color center research. Femtosecond laser direct writing enables precise creation of color centers, offering nanoscale accuracy. This study explores the optical properties and structural changes in 4H-SiC induced by laser writing. Techniques such as Raman spectroscopy, atomic force microscopy, scanning electron microscopy, and transmission electron microscopy are used to analyze lattice damage and transformations, providing insights into precise color center fabrication and its implications for quantum applications.

Article Details

Volume / Issue Vol. 137, Issue 12
Published March 28, 2025
ISSN 0021-8979
Publisher American Institute of Physics

Journal Info

Journal of Applied Physics

American Institute of Physics

ISSN: 0021-8979 Physical Sciences

Authors (19)

X

Xinghua Liu

J

Junxian Luo

National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, and Collaborative Innovation Center of Advanced Microstructures, Nanjing University 3 , Nanjing 210023,

J

Jiandong Ye

School of Electronic Science and Engineering, Nanjing University 2 , Nanjing 210023,

J

Jie Fu

Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory of Advanced Negative Carbon Technologies, Soochow University, 199 Ren’ai Road, Suzhou, Jiangsu 215123, China

Q

Qunsi Yang

State Key Laboratory of Silicon and Advanced Semiconductor Materials & School of Materials Science and Engineering, Zhejiang University 3 , Hangzhou 310027,

Y

Yiwang Wang

School of Electronic Science and Engineering, Nanjing University 1 , Nanjing 210023,

X

Xiufang Chen

Institute of Novel Semiconductors, Shandong University 1 , Jinan 250100,

T

Tao Tao

B

Bin Liu

Q

Qiang Xu

Key Laboratory of Material Simulation Methods & Software of Ministry of Education, College of Physics

H

Haizhi Song

Southwest Institute of Technical Physics 5 , Chengdu 610041,

W

Weizong Xu

School of Electronic Science and Engineering, Jiangsu Key Laboratory of Advanced Semiconductors and High Energy Efficiency Devices, and Key Laboratory of Optoelectronic Devices and Systems with Extreme Performances of MOE, Nanjing University 1 , Nanjing 210023,

D

Dong Zhou

F

Feng Zhou

X

Xiangang Xu

Institute of Novel Semiconductors, Shandong University 1 , Jinan 250100,

F

Fang-fang Ren

School of Electronic Science and Engineering, Nanjing University 2 , Nanjing 210023,

F

Fei Xu

H

Hai Lu

R

Rong Zhang

Department of Materials Science and Engineering, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong 999077, China