Collisionless magnetized rf sheath resonance heating in dual-frequency capacitively coupled plasmas

Abstract

This study employs Particle-In-Cell/Monte Carlo Collision simulations to examine the magnetized radio frequency sheath resonance heating mechanism in a voltage-driven discharge using a dual-frequency source. The effects of low-frequency (LF) voltage, high-frequency (HF) voltage, and pressure on the resonance heating mechanism are well examined. Increasing the LF voltage and the HF voltage produces opposite effects on the resonance effect. In comparison to the traditional dual-frequency discharges, the application of a magnetic field under resonant conditions shifts the maximum heating rate from the low-frequency sheath collapse phase to the maximum phase of LF sheath expansion. This shift indicates significant changes in the heating mode and electron dynamical behavior induced by the resonance effect.