AlN-on-sapphire microdisk resonators for precise on-chip temperature sensing
Abstract
Photonic integrated circuit sensors can be used for precise sensing of the environment, offering the advantage of integration with fiber networks for remote and multiplexed sensor arrays. In this work, we examine the performance of aluminum nitride on sapphire microdisk mode resonators in an all-pass configuration. We discuss their potential as on-chip temperature sensors under fixed-frequency and frequency-scanning modes, demonstrating the latter can measure a 1 K temperature change with an uncertainty of ±5.1 mK over a temperature range of 25–55 °C.
Article Details
Journal Info
Journal of Applied Physics
American Institute of Physics
Authors (9)
D. O. Armstrong
School of Engineering, Cardiff University 1 , Queen’s Buildings, The Parade, Cardiff CF24 3AA,
J. K. Cannon
School of Engineering, Cardiff University 1 , Queen’s Buildings, The Parade, Cardiff CF24 3AA,
O. Kiely
School of Engineering, Cardiff University 1 , Queen’s Buildings, The Parade, Cardiff CF24 3AA,
S. Ibrahim
School of Engineering, Cardiff University 1 , Queen’s Buildings, The Parade, Cardiff CF24 3AA,
H. B. Yağcı
School of Engineering, Cardiff University 1 , Queen’s Buildings, The Parade, Cardiff CF24 3AA,
T. Peach
Institute for Compound Semiconductors, Translational Research Hub 2 , Maindy Road, Cardiff CF24 4HQ,
P. Wong
Institute for Compound Semiconductors, Translational Research Hub 2 , Maindy Road, Cardiff CF24 4HQ,
J. P. Hadden
School of Engineering, Cardiff University 1 , Queen’s Buildings, The Parade, Cardiff CF24 3AA,
A. J. Bennett
School of Engineering, Cardiff University 1 , Queen’s Buildings, The Parade, Cardiff CF24 3AA,