Air-coupled piezoelectric micromachined ultrasonic transducer array based on low-cost and large remnant polarization PZT thin film
J
Jia-Ling Lin
Y
Ya-Han Liu
C
Chien-Lun Kao
S
Shao-Wei Wu
H
Han-Jen Hsu
H
Hsiao-Chi Lin
C
Chih-Ying Li
C
Chun-Yuan Chen
Y
Yeong-Her Wang
C
Chih-Hsien Huang
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
October 31, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (10)
J
Jia-Ling Lin
Y
Ya-Han Liu
C
Chien-Lun Kao
S
Shao-Wei Wu
H
Han-Jen Hsu
H
Hsiao-Chi Lin
C
Chih-Ying Li
C
Chun-Yuan Chen
Y
Yeong-Her Wang
C
Chih-Hsien Huang
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