A vibration analysis of an acoustic mass sensor structure with a c-axis tilted ZnO thin film based on silicon
J
Jing Liu
X
Xiangyang Li
X
Xiaomin Li
(Department of Chemistry, Shanghai Stomatological Hospital & School of Stomatology, State Key Laboratory of Molecular Engineering of Polymers, iChem (Collaborative Innovation Center of Chemistry for Energy Materials), Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials)
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
October 28, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (3)
J
Jing Liu
X
Xiangyang Li
X
Xiaomin Li
Department of Chemistry, Shanghai Stomatological Hospital & School of Stomatology, State Key Laboratory of Molecular Engineering of Polymers, iChem (Collaborative Innovation Center of Chemistry for Energy Materials), Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials
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