A vibration analysis of an acoustic mass sensor structure with a c-axis tilted ZnO thin film based on silicon

J Jing Liu X Xiangyang Li X Xiaomin Li (Department of Chemistry, Shanghai Stomatological Hospital & School of Stomatology, State Key Laboratory of Molecular Engineering of Polymers, iChem (Collaborative Innovation Center of Chemistry for Energy Materials), Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials)

Article Details

Volume / Issue Vol. 15, Issue 1
Published October 28, 2025
ISSN 2045-2322
Publisher Nature Portfolio

Journal Info

Scientific Reports

Nature Portfolio

ISSN: 2045-2322 Open Access Life Sciences

Authors (3)

J

Jing Liu

X

Xiangyang Li

X

Xiaomin Li

Department of Chemistry, Shanghai Stomatological Hospital & School of Stomatology, State Key Laboratory of Molecular Engineering of Polymers, iChem (Collaborative Innovation Center of Chemistry for Energy Materials), Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials