A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator
C
Cheng Zeng
Y
Yongshan Xu
X
Xinqi Wei
J
Jianing Liang
Z
Zongdong Sun
X
Xiaoyu He
G
Gaofeng Du
S
Shuhao Wang
Y
Yao Liu
X
Xing Zhou
Y
Yuan Li
K
Kailang Liu
Y
Ying Ma
T
Tianyou Zhai
(State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering)
H
Huiqiao Li
(State Key Laboratory of Materials Processing and Die & Mould Technology, and School of Materials Science and Engineering)
Article Details
Journal
Nature Communications
Volume / Issue
Vol. 17, Issue 1
Published
January 28, 2026
ISSN
2041-1723
Publisher
Nature Portfolio
Authors (15)
C
Cheng Zeng
Y
Yongshan Xu
X
Xinqi Wei
J
Jianing Liang
Z
Zongdong Sun
X
Xiaoyu He
G
Gaofeng Du
S
Shuhao Wang
Y
Yao Liu
X
Xing Zhou
Y
Yuan Li
K
Kailang Liu
Y
Ying Ma
T
Tianyou Zhai
State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering
H
Huiqiao Li
State Key Laboratory of Materials Processing and Die & Mould Technology, and School of Materials Science and Engineering
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