A progressive wafer scale approach for Sub-10 nm nanogap structures
J
Jongjin Cha
G
Geon Lee
(Department of Mechanical Engineering, Pohang University of Science and Technology)
D
Dukhyung Lee
D
Dai-Sik Kim
S
Sunghwan Kim
(Department of Chemistry, Kyungpook National University)
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
April 02, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (5)
J
Jongjin Cha
G
Geon Lee
Department of Mechanical Engineering, Pohang University of Science and Technology
D
Dukhyung Lee
D
Dai-Sik Kim
S
Sunghwan Kim
Department of Chemistry, Kyungpook National University
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