A feature-enhanced transformer for point-like micro-defect detection on semiconductor wafer surfaces
Z
Zhen Wu
H
Hu Zhang
(State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering)
T
Tianren Ming
X
Xiaoan Hu
F
Fengkai Luan
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 1, Issue 1
Published
June 11, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (5)
Z
Zhen Wu
H
Hu Zhang
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering
T
Tianren Ming
X
Xiaoan Hu
F
Fengkai Luan
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