25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography

Zhi Chen; Lijing Zhong; Xiangyu Sun; Yihui Fu; Huilin He; Huijiao Ji; Yuying Wang; Xiaofeng Liu; Beibei Xu; Zhemin Wu; Chen Zou; Zhijun Ma; Jingyu Zhang; Guoping Dong; Giuseppe Barillaro; Cheng-Wei Qiu; Jianbei Qiu; Jianrong Qiu

doi:10.1038/s41467-025-62426-1

25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography

Z Zhi Chen L Lijing Zhong X Xiangyu Sun Y Yihui Fu H Huilin He H Huijiao Ji Y Yuying Wang (State Key Laboratory of Biotherapy and Cancer Center, West China Hospital, Sichuan University) X Xiaofeng Liu B Beibei Xu Z Zhemin Wu C Chen Zou Z Zhijun Ma J Jingyu Zhang (East China University of Science and Technology , , ,) G Guoping Dong G Giuseppe Barillaro C Cheng-Wei Qiu J Jianbei Qiu J Jianrong Qiu

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Article Details

Journal Nature Communications

Volume / Issue Vol. 16, Issue 1

Published August 12, 2025

DOI 10.1038/s41467-025-62426-1

ISSN 2041-1723

Publisher Nature Portfolio

Journal Info

Nature Communications

Nature Portfolio

ISSN: 2041-1723 Open Access Life Sciences

Authors (18)

Z

Zhi Chen

L

Lijing Zhong

X

Xiangyu Sun

Y

Yihui Fu

H

Huilin He

H

Huijiao Ji

Y

Yuying Wang

State Key Laboratory of Biotherapy and Cancer Center, West China Hospital, Sichuan University

X

Xiaofeng Liu

B

Beibei Xu

Z

Zhemin Wu

C

Chen Zou

Z

Zhijun Ma

J

Jingyu Zhang

East China University of Science and Technology , , ,

G

Guoping Dong

G

Giuseppe Barillaro

C

Cheng-Wei Qiu

J

Jianbei Qiu

J

Jianrong Qiu

25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography

Article Details

Journal Info

Authors (18)

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