Tomoya Okuda, Shunsuke Ota, Takahiko Kawahara, Kozo Makiyama, Ken Nakata, Takuya Maeda, Atsushi Kobayashi. "Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures." Applied Physics Letters (2025). https://doi.org/10.1063/5.0228924