Bhattacharya, S., Sahoo, S., Dong, H., Hong, D. H., Taniguchi, T., Watanabe, K., Mason, N., Zande, A. V. D., Bogdanov, S. I., Sankaran, R. M. (2026). Remote plasma for damage-controlled fabrication of single-photon emitters in ultrathin hexagonal boron nitride. Applied Physics Letters. https://doi.org/10.1063/5.0327648